MEMS PI Focus



MEMS Precision Instruments does leading edge research and development of techniques in MEMS. At the present time MEMS PI is focusing on compliant mechanisms for microrobotics.

Focus Items
  • High Aspect Ratio Structures
  • Single Crystal Silicon
  • Polysilicon
  • Electroless Nickel
  • Many Other Materials possible
  • MicroTweezers
  • Single Crystal Silicon
  • Polysilicon
  • HEXSIL
  • Surface Micromachined
  • MicroScissors
  • Particle Organizer
  • Force Sensors
  • Actuators
  • Thermal Expansion
  • Electromagnetic
  • Piezoelectric
  • Solder Fatigue Tester
  • Tensile Tester
  • Filter
  • Capsules
  • Freestanding, self-supporting microtools
    and machines on the centimeter to micrometer scale


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