Microfabricated High Aspect Ratio Silicon Flexures: Hexsil, RIE, and KOH Etched.
Design & Fabrication
Chris Keller, Ph.D.
370 pages, over 300 pictures, 8.5 by 11 inches, acid free paper.
published December 1998
This book is the result of 6 years work in the Microfabrication Lab at Berkeley, during which the author designed and fabricated many devices with high aspect ratio flexures. Please click on Book Abstract, and Table of contents, below to learn more.
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